Author Affiliations
Abstract
1 R&
2 D Center for Optical Thin Film Coatings, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
ZrO2 thin films were prepared in electron beam thermal evaporation method. And the deposition rate changed from 1.3 to6.3 nm/s in our study. X-ray diffractometer and spectrophotometer were employed to characterize the films. X-raydiffraction (XRD) spectra pattern shows that films structure changed from amorphous to polycrystalline with deposition rate increasing. The results indicate that internal stresses of the films are compressive in most case. Thin films deposited in our study are inhomogeneous, and the inhomogeneity is enhanced with the deposition rate increasing.
310.1860 deposition and fabrication 310.6870 thin films other properties Chinese Optics Letters
2004, 2(6): 06364
Author Affiliations
Abstract
Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
Diamond films were deposited in microwave plasma chemical vapor deposition (MPCVD) method on plain silicon substrates with (100) orientation. And the pinhole defects on them were investigated by optical microscopy and scanning electron microscopy (SEM). X-ray masks were fabricated with the films deposited by us. We found the pinhole defects in the film destroyed the gold absorber. The corrosion-resistance tests conducted in 30% KOH solution under 80 oC showed that the diamond films with pinhole defects have lower corrosion-resistance. In addition, the possible mechanism of the formation of pinhole defects in diamond films was discussed. And we deduced that the defects on substrates, competitive growth of multi-phase in diamond films, lattice dislocation between substrates and diamond films could be associated with the defect formation.
160.4890 organic materials 310.6870 thin films other properties 310.3840 materials and process characterization Chinese Optics Letters
2004, 2(2): 02116